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High
Force MEMS Actuator
This is an
SEM photograph of a
MEMS
high force actuator. The device, also known on as a comb drive, operates
by electrostatic forces. When a voltage is applied between the banks of
interdigitated fingers, an electrostatic field is produced. This
electrostatic field creates an electrostatic force, which causes the
actuator to move. This motion is then coupled to a center output element
which is able to produce usable amounts of force. The amount of force
that can be achieved in such a device if proportional to the number of
fingers, and the thickness of each one. This is designed to have thick
fingers, and large numbers of fingers. This allows creation of useful
amounts of force. |