MEMS Mirror Array

MEMS Mirror Array

This is an SEM photograph of a MEMS mirror array. The device has a closely packed, one dimensional array of mirrors. These are piston mirrors, capable of vertical displacement only. This piston motion can be used to adjust the phase of optical signals, allowing correction of chromatic dispersion. The mirrors are made of polycrystalline silicon, and are coated with a thin layer of gold to improve reflectivity.