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MEMS
Mirror
This is an
SEM photograph of a
MEMS
mirror. The lighter colored region are segments of the mirror. The
corner of the mirror segments are held by thin spring structures.
Underneath the mirrors are actuators. The actuators can lift the central
hub, where the springs come together. This is one small segment of a
much larger array. By selectively lifting individual points like the one
in the center of this picture, the array can be made to take on a
variety of shapes. This creates a larger deformable mirror. The device
was designed to be the heart of an adaptive optics system. Adaptive
optics allow a variety of interesting devices. It can be used to create
instruments to allow ophthalmic surgeons get a much clearer picture of
the retina, enabling early detection and treatment of ocular
degeneration. Adaptive optics have also been used to allow astronomers
to get unprecedented clarity when imaging distant stars in the universe.
Adaptive optics can also be used to improve targeting of advanced
missile systems.
The overall mirror array is several
millimeters across. The small spring elements shown in the photograph
are about a micron
across. |