MEMS
Mcromirror
This is an
SEM photograph of a
MEMS
microscopic
mirror. The mirror element is the circular region in the center of the
micrograph. The mirror is surrounded by three banks of electrostatic
actuators. When a voltage is applied to one actuator, it moves, and that
motion is translated to a vertical motion by a lift mechanism. The lift
mechanism is connected to the mirror, and that edge of the mirror is
lifted. Because there are three actuators, and three lift mechanisms,
the position of the mirror can be controlled at three different points.
This results in an ability to point the mirror in any direction desired.
By pointing the mirror, it can be used to redirect optical systems.
Arrays of mirrors like this one have been used to create
telecommunication equipment with an unprecedented ability to switch
data. Devices like this are used to create optical cross-connects, and
all optical digital networks. |