MEMS
Hinge
This is an
SEM photograph of a
MEMS
microscopic hinge. The hinge is connected to the edge of a mirror, which
can be seen in the right part of the micrograph. The flexible springs in
the hinge allow the mirror to tilt and pivot. The
mirror is
connected to two vertical lifters (outside the field of view of this
photograph). This hinge, combined with the lifting action of the two
vertical lifters, allow the mirror to be pointed in a variety of
directions. The mirror is used in optical switching systems.
The flexible hinge element is about a
micron in
diameter. |