MEMS Hinge

 

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MEMS Hinge

MEMS Hinge

This is an SEM photograph of a MEMS microscopic hinge. The hinge is connected to the edge of a mirror, which can be seen in the right part of the micrograph. The flexible springs in the hinge allow the mirror to tilt and pivot. The mirror is connected to two vertical lifters (outside the field of view of this photograph). This hinge, combined with the lifting action of the two vertical lifters, allow the mirror to be pointed in a variety of directions. The mirror is used in optical switching systems.

The flexible hinge element is about a micron in diameter.

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